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半导体加工

The entire process of semiconductor and electronic product manufacturing demands an extremely dry environment. Any instance of excessive humidity can trigger a chain reaction of issues, compromising both product quality and production efficiency.

In high-humidity conditions, circuit contacts are prone to corrosion, moisture can condense on chip surfaces, and photoresist may adhere improperly—all of which directly lead to operational failures during semiconductor packaging. Soldering processes see a notable increase in defect rates, and hygroscopic photoresist can absorb ambient moisture, resulting in erroneous connections or disconnections in microcircuits and ultimately causing circuit malfunction. In wafer fabrication areas, when a spin coater sprays developer to cool the wafer, water vapor in the air can condense on the wafer surface, altering the chemical properties of the developer. At the same time, moisture absorption by the photoresist can cause polymer expansion. In overly humid lithography rooms, silicon dioxide absorbs water and photoresist adhesion becomes unreliable, leading to wafer breakage under stress and the formation of surface defects.

Furthermore, high humidity accelerates the aging of vacuum pumps, reducing the rotational speed of equipment such as cryopumps. Lowering relative humidity can improve batch processing speed. If water vapor condenses on the surfaces of low-temperature epitaxial equipment, it can corrode components, cause operational failures, and reduce processing efficiency.

As a core supplier of dehumidification components for industrial dehumidifiers, our desiccant rotors play an essential role in enabling effective humidity control technology. With high-performance rotors, dehumidification systems can precisely regulate moisture levels, effectively preventing the issues described above. They provide a stable and suitable environment for dry workspaces, cleanrooms, and various semiconductor manufacturing processes—ensuring smooth operation throughout semiconductor and electronics production while helping companies enhance efficiency and reduce defect rates.